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| No | Photo | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|---|
| 9091002 | (17) | Etch | MATTSON | Paradigme | 300 | ME0121 | Etch |
| 2101003 | (28) | CVD | AMAT | P5000 | 150 | CA5905 | PECVD |
| (17) | Metrology | Nikon | 230565 | 94LL12021 | Scope | ||
| 7091004 | (39) | Etch | AMAT | P5000 | 200 | 7284 | Metal |
| 8101010 | (10) | Etch | AMAT | Centura AP | 300 | ||
| 7091002 | (22) | CVD | AMAT | P5000 | 150 | 4291 | PECVD |
| '0031012 | (38) | CVD | AMAT | P5000 | 200 | 4531 | CVD |
| 2011004 | (7) | Etch | LAM | Torus300B | 300 | Bevel etch | |
| '0101001 | (23) | Etch | AMAT | DPS II MESA | 300 | 430282 | Poly |
