No | Photo | Category | Maker | Model | Wafer Size | SN | Process |
---|---|---|---|---|---|---|---|
8101010 | (10) | Etch | AMAT | Centura AP | 300 | ||
7091002 | (22) | CVD | AMAT | P5000 | 150 | 4291 | PECVD |
'0031012 | (38) | CVD | AMAT | P5000 | 200 | 4531 | CVD |
2011004 | (7) | Etch | LAM | Torus300B | 300 | Bevel etch | |
7091004 | (39) | Etch | AMAT | P5000 | 150 | 7284 | Metal |
'0101001 | (23) | Etch | AMAT | DPS II MESA | 300 | 430282 | Poly |
7111001 | (28) | CVD | AMAT | P5000 | 150 | TEOS | |
2121001 | (41) | CVD | AMAT | P5000 | 150 | 4677 | PECVD |
7111003 | (35) | CVD | AMAT | P5000 | 150 | 5945 | W CVD |