26011005. AMAT G5-MESA-PULSE Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 26011005 | ETCH | AMAT | G5-MESA-PULSE | 300 | 407674 | Poly |
| Config |
EFEM, 3 LP, ATM, VHP, 3x DPS MESA chamber, 1x Axiom chamber 3x Seiko Turbo, 6x Paramount |
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