25101009. TEL VIGUS-MK3 Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 25101009 | ETCH | TEL | VIGUS-MK3 | 300 | FE0955 | |
| Config |
SFEM only |
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| Docs. |
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