26011007. MATTSON PARADIGME-POLY Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 26011007 | ETCH | MATTSON | PARADIGME-POLY | 300 | ME0089 | Poly |
| Config |
ASYST EFEM,3 LP, 8 RF, 2Seikoturbo, |
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