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| No | Photo | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|---|
| 2011004 | (15) | Etch | LAM | Torus300B | 300 | Bevel etch | |
| 9091002 | (17) | Etch | MATTSON | Paradigme | 300 | ME0121 | Etch |
| 2101002 | (19) | Etch | AMAT | DPS II MESA | 300 | 407529 | Poly |
| 7101002 | (25) | Etch | Lam | 2300, Exelan | 300 | Oxide | |
| 9091001 | (6) | Etch | LAM | Torus 300LP | 300 | CBT31201 | Bevel etch |
| 0101001-1 | (18) | Etch | AMAT | Axiom | 300 | ||
| 2121001 | (0) | CVD | AMAT | P5000 | 150 | 4677 | PECVD |
| 2061006 | (8) | Etch | LAM | EXTRIMA6000 | 300 | S31L-07-016 | Bevel Etch |
| 2101003 | (27) | CVD | AMAT | P5000 | 150 | CA5905 | PECVD |
