No | Photo | Category | Maker | Model | Wafer Size | SN | Process |
---|---|---|---|---|---|---|---|
2101001 | (24) | CVD | AMAT | P5000 | 200 | 4613 | PECVD |
2121001 | (41) | CVD | AMAT | P5000 | 150 | 4677 | PECVD |
7111003 | (35) | CVD | AMAT | P5000 | 150 | 5945 | W CVD |
2011005 | (17) | Etch | PSK | TERA21 | 300 | PTK04014 | Strip |
3041001 | (39) | CVD | AMAT | P5000 | 150 | 4172 | W CVD |
3051001 | (45) | Etch | TEL | Unity 2 855DD | 200 | U01651 | Oxide |
2011004 | (15) | Etch | LAM | Torus300B | 300 | Bevel etch | |
9091002 | (17) | Etch | MATTSON | Paradigme | 300 | ME0121 | Etch |
2101002 | (19) | Etch | AMAT | DPS II MESA | 300 | 407529 | Poly |