25101021. LAM 2300KIYO_FX Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 25101021 | ETCH | LAM | 2300KIYO_FX | 300 | ||
| Config |
V2 EFEM, VTM w/Mag7 Robot, |
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| Docs. |
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