25101013. PSK TERA21 Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 25101013 | ETCH | PSK | TERA21 | 300 | PTK04007 | |
| Config |
2 x Twin u-wave type Chambers |
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| Docs. |
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