25101010. LAM 2300KIYO_FX Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 25101010 | ETCH | LAM | 2300KIYO_FX | 300 | 116328 | |
| Config |
V2 EFEM, VTM w/Mag7 Robot, |
|||||
| Docs. |
|
|||||