4041002. AMAT P5000 Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 4041002 | Etch | AMAT | P5000 | 150 | Poly | |
| Config |
2x MXP, 8 Slot storage, EPD, AC Remote Rack w/ OEM12B MiniController AMAT0, Neslab HX150 |
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| Docs. |
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