3051001. TEL Unity 2 855DD Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 3051001 | Etch | TEL | Unity 2 855DD | 200 | U01651 | Oxide |
| Config |
2x DRM System V2 Controller Rack AC Rack 1x SMC Chiller |
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| Docs. |
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