3041001. AMAT P5000 Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 3041001 | CVD | AMAT | P5000 | 150 | 4172 | W CVD |
| Config |
3x W CVD, Lamp Type 8 Slot storage |
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| Docs. |
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