2101002. AMAT DPS II MESA Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 2101002 | Etch | AMAT | DPS II MESA | 300 | 407529 | Poly |
| Config |
Buffer chamber 1x Axiom chamber AC rack No EFEM, No DPS Chamber |
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