2101003. AMAT P5000 Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 2101003 | CVD | AMAT | P5000 | 150 | CA5905 | PECVD |
| Config |
2x DLH chamber |
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| Docs. |
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