2061002. AMAT P5000 Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 2061002 | CVD | AMAT | P5000 | 150 | 4512 | PECVD |
| Config |
P5000 Main Body ( 3x DLH PECVD Chamber,) Remote AC Rack include 3x RF Generator. 1x H/E AMAT0 1x Monitor rack |
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| Docs. |
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