2011004. LAM Torus300B Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 2011004 | Etch | LAM | Torus300B | 300 | Bevel etch | |
| Config |
EFEM, ATM Robot and 3 Brooks Loader |
|||||
| Docs. |
|
|||||