2011004. LAM Torus300B Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 2011004 | Etch | LAM | Torus300B | 300 | Bevel etch | |
| Config |
2x Bevel etch chamber EFEM, 3 Brooks Loader 2x TM, Mag8 Robot AC rack |
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