2011004. LAM Torus300B Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 2011004 | Etch | LAM | Torus300B | 300 | Bevel etch | |
| Config |
EFEM, BROOKS ATM Robot, |
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| Docs. |
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