'0101001. AMAT DPS II MESA Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| '0101001 | Etch | AMAT | DPS II MESA | 300 | 430282 | Poly |
| Config |
No EFEM: Buffer chamber : NO VHP robot 4 Process chamber (3x DPS II, 1x Axiom) ( No Turbo pump) AC rack |
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| Docs. |
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