'0031012. AMAT P5000 Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| '0031012 | CVD | AMAT | P5000 | 200 | 4531 | CVD |
| Config |
3x DLH chamber, 8 Slot storage, 3x OEM12B RF Generator, |
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| Docs. |
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