9091002. MATTSON Paradigme Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 9091002 | Etch | MATTSON | Paradigme | 300 | ME0121 | Etch |
| Config |
SFEM only. Yaskawa robot : XU-RC820M-F01 Rorze 2x Load Port: RV201-F06-A02-1 |
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| Docs. |
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