9021003. KLA MIS-200 Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 9021003 | Metrology | KLA | MIS-200 | 200 | Inspection | |
| Config |
Review inspection. No Scope. No HDD. |
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| Docs. |
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