7101002. Lam 2300, Exelan Sunny-tech
| No | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|
| 7101002 | Etch | Lam | 2300, Exelan | 300 | Oxide | |
| Config |
2x Exelan chamber, TM AC Rack Controller GAS Box Missing: (EFEM , Mag7 robot, RF cart , Turbo pump, ) |
|||||
| Docs. |
|
|||||