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| No | Photo | Category | Maker | Model | Wafer Size | SN | Process |
|---|---|---|---|---|---|---|---|
| 2011004 | (6) | Etch | LAM | Torus300B | 300 | Bevel etch | |
| 25031003 | (12) | Etch | LAM | e4 EFEM | 300 | ACP16414 | EFEM |
| 25031002 | (14) | Etch | LAM | e4 EFEM | 300 | ACP16413 | EFEM |
| 25031001 | (22) | CVD | TEL | Trias+ | 300 | J11069 | CVD |
| 4111001 | (18) | Metrology | NOVA | NS3090 | 300 | Measurement | |
| 4041002 | (0) | Etch | AMAT | P5000 | 200 | Poly | |
| 9091002 | (17) | Etch | MATTSON | Paradigme | 300 | ME0121 | Etch |
| 2101003 | (28) | CVD | AMAT | P5000 | 150 | CA5905 | PECVD |
| (17) | Metrology | Nikon | 230565 | 94LL12021 | Scope |
